Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

الموضوعات

علوم بحتة وطبيعية

الملخص

In this thesis, we present theoretical and experimental investigation into the nonlinear statics and dynamics of clamped-clamped in-plane MEMS arches when excited by an electrostatic force. Theoretically, we first solve the equation of motion using a multi- mode Galarkin Reduced Order Model (ROM). We investigate the static response of the arch experimentally where we show several jumps due to the snap-through instability. Experimentally, a case study of in-plane silicon micromachined arch is studied and its mechanical behavior is measured using optical techniques. We develop an algorithm to extract various parameters that are needed to model the arch, such as the induced axial force, the modulus of elasticity, and the initially induced initial rise. After that, we excite the arch by a DC electrostatic force superimposed to an AC harmonic load. A softening spring behavior is observed when the excitation is close to the first resonance frequency due to the quadratic nonlinearity coming from the arch geometry and the electrostatic force. Also, a hardening spring behavior is observed when the excitation is close to the third (second symmetric) resonance frequency due to the cubic nonlinearity coming from mid-plane stretching. Then, we excite the arch by an electric load of two AC frequency components, where we report a combination resonance of the summed type. Agreement is reported among the theoretical and experimental work.

روابط وملفات

التعريف والنوع

رقم الوثيقة

0549f45a-ac55-49d3-bc19-c0b1c0760047

رقم العقد

0

نوع الوسائط

Crawler

نوع المحتوى

الرسائل العلمية

صيغة المصدر

رسائل ماجيستير

نوع الملف

word

أسماء الملفات

1700184_1.pdf

بيانات النشر

ألقاب المؤلفين

[{"name_ar":"محمد ابراهيم يونس","title_ar":"اشراف","title_en":"Supervision"},{"name_ar":"محمد الحناوي قيس","title_ar":"اعداد","title_en":"Preparation"}]

اللغة

English

المصدر والدورية

اسم المصدر

Nonlinear Dynamics of Electrostatically Actuated MEMS Arches

المحتوى والصفحات

عدد الصفحات

0

كلمات الباحثين

Dynamics, Frequencies , MEMS , Microarch , Snap-Through

إشراف وإعداد

الإشراف

محمد ابراهيم يونس

الإعداد

محمد الحناوي قيس

الاقتباسات الببليوغرافية